We applied advanced computational fluid dynamics analyses to optimize the Fiji reactor, heater, and trap geometry. The system’s intuitive interface makes it easy to monitor and change recipes and processes as needed.
Fiji’s advanced features include:
- Proprietary Chamber Turbo Pumping System
- Improved Plasma Design
- Ergonomic Operator Interface
- In-Situ Ellipsometry
- In-Situ Quart Crystal Microbalance
- Integrated Ozone
- Glove box Interface
The Fiji is available in several different configurations, including Dual Chamber and Load Lock. Each chamber can be configured with up to six precursor lines that can accommodate solid, liquid or gas precursors, and six plasma gas lines, offering significant experimental flexibility in a compact and affordable footprint.