Deposition system for glove box integration
Deposition systems is designed for integration into glove boxes which are used where oxygen or water vapour-intolerant electronic materials are to be coated. The system is fitted with a special chamber to allow straightforward integration into the Vortex Prime and Vortex Pro glove boxes. The chamber can be rear load lock integrated of glovebox base plate integrated.
Source options include resistance, sputter and electron beam plus a range of temperature-controlled effusion sources for the deposition of organic materials.